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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10128121
Issue Dt:
11/13/2018
Application #:
15304570
Filing Dt:
10/17/2016
Publication #:
20170040177
Pub Dt:
02/09/2017
Inventors:
Mitsuru SASAKI, Tatsuya MIURA, Toshihiro OHNO, Kazumune ONO, Shoko ENDO, Ryu KITAHARA
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING PROGRAM
Assignment: 1
Reel/Frame:
040031/0222Recorded: 10/17/2016Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SASAKI, MITSURU
Exec Dt:
10/11/2016
MIURA, TATSUYA
Exec Dt:
10/11/2016
OHNO, TOSHIHIRO
Exec Dt:
10/14/2016
ONO, KAZUMUNE
Exec Dt:
10/11/2016
ENDO, SHOKO
Exec Dt:
10/07/2016
KITAHARA, RYU
Exec Dt:
10/07/2016
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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