Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15211124
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Filing Dt:
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07/15/2016
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Publication #:
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Pub Dt:
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02/02/2017
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Inventor:
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Nobuo MIYAMOTO
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Title:
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METHOD OF CLEANING ELECTRON SOURCE AND ELECTRON BEAM WRITING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, SHINSUGITA-CHO, ISOGO-KU |
| YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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