Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/2019
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Application #:
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15527645
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Filing Dt:
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05/17/2017
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Publication #:
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Pub Dt:
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12/21/2017
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Inventors:
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Marc HAUPTMANN, Dylan John David DAVIES, Paul JANSSEN, Naoko TSUGAMA et al
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Title:
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METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS, LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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