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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
04/09/2019
Application #:
15266639
Filing Dt:
09/15/2016
Publication #:
Pub Dt:
03/16/2017
Inventors:
Noel Russell, Nicholas Joy, Allen J. Leith, Yan Shao, Soo Doo Chae, Joshua LaRose et al
Title:
METHOD FOR HIGH THROUGHPUT USING BEAM SCAN SIZE AND BEAM POSITION IN GAS CLUSTER ION BEAM PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
040000/0818Recorded: 10/12/2016Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/16/2016
Exec Dt:
09/16/2016
Exec Dt:
09/27/2016
Exec Dt:
09/26/2016
Exec Dt:
09/26/2016
Exec Dt:
09/26/2016
Exec Dt:
09/26/2016
Exec Dt:
09/26/2016
Exec Dt:
09/27/2016
Assignee:
900 MIDDLESEX TURNPIKE, BLDG. 6
BILLERICA, MASSACHUSETTS 01821
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD.
AUSTIN, TX 78741
Assignment: 2
Reel/Frame:
051843/0245Recorded: 02/07/2020Pages: 17
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
01/01/2020
Assignee:
3455 LYMAN BLVD.
CHASKA, MINNESOTA 55318
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD
AUSTIN, TX 78741

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