Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2019
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Application #:
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15014901
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Filing Dt:
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02/03/2016
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Publication #:
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Pub Dt:
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06/02/2016
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Inventors:
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Alexei MARAKHTANOV, Eric A. HUDSON, Rajinder DHINDSA, Neil BENJAMIN
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Title:
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METHODS AND APPARATUS FOR A HYBRID CAPACITIVELY-COUPLED AND AN INDUCTIVELY-COUPLED PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303 |
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