Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2019
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Application #:
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14647996
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Filing Dt:
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05/28/2015
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Publication #:
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Pub Dt:
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11/19/2015
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Inventors:
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Hui Wang, Liangzhi Xie, Xi Wang, Fuping Chen, Shena Jia, Xiaoyan Zhang
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Title:
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METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| BUILDING 4, NO. 1690, CAI LUN ROAD |
| ZHANGJIANG HIGH-TECH PARK, PUDONG DISTRICT |
| SHANGHAI, CHINA 201203 |
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| T. CHYAU LIANG |
| 909 FANNIN ST. |
| SUITE 3500 |
| HOUSTON, TX 77010 |
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