Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/28/2019
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Application #:
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15665515
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Filing Dt:
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08/01/2017
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Publication #:
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Pub Dt:
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03/01/2018
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Inventors:
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Xinghua Sun, Takashi Yamamura, Hiroyuki Nagai, Ryuichi Asako, Katie Lutker-Lee
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Title:
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MANUFACTURING METHODS TO PROTECT ULK MATERIALS FROM DAMAGE DURING ETCH PROCESSING TO OBTAIN DESIRED FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| AKASAKA BIZ TOWER |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| WOOD, HERRON & EVANS, LLP (TOKYO ELECTRO |
| 2700 CAREW TOWER |
| 441 VINE STREET |
| CINCINNATI, OH 45202 |
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