Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/08/2019
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Application #:
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15474302
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Filing Dt:
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03/30/2017
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Publication #:
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Pub Dt:
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10/04/2018
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Inventors:
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Changhua Liu, Jeremy D. Ecton, Arnab Roy, Timothy A. White, Oscar U. Ojeda et al
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Title:
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ANISOTROPIC ETCHING SYSTEMS AND METHODS USING A PHOTOCHEMICALLY ENHANCED ETCHANT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BLVD. |
| SANTA CLARA, CALIFORNIA 95054 |
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| GROSSMAN, TUCKER, PERREAULT & PFLEGER, PLLC |
| 900 2ND AVENUE SOUTH, SUITE 600 |
| MINNEAPOLIS, MN 55402 |
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