Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/08/2019
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Application #:
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15688751
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Filing Dt:
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08/28/2017
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Publication #:
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Pub Dt:
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03/01/2018
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Inventors:
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Prateek Jain, Daniel Wack, Kevin A. Peterlinz, Andrei V. Shchegrov, Shankar Krishnan
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Title:
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Spectral Reflectometry For In-Situ Process Monitoring And Control
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| JOSEPH S SPANO |
| 851 BURLWAY ROAD, SUITE 407 |
| BURLINGAME, CA 94010 |
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