Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/12/2019
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Application #:
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14660531
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Filing Dt:
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03/17/2015
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Publication #:
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Pub Dt:
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09/22/2016
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Inventors:
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Kenneth S. Collins, Kartik Ramaswamy, Yang Yang, James D. Carducci, Shahid Rauf et al
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Title:
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ION-ION PLASMA ATOMIC LAYER ETCH PROCESS AND REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| LAW OFFICE OF ROBERT M. WALLACE |
| VENTURA, CA 93003 |
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