Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/26/2019
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Application #:
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15624822
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Filing Dt:
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06/16/2017
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Publication #:
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Pub Dt:
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12/21/2017
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Inventors:
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Norihiro Ito, Nobuhiro Ogata, Jiro Higashijima, Kazuhiro Aiura, Yusuke Hashimoto
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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| ABELMAN, FRAYNE & SCHWAB/LEE |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-4046 |
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