Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/26/2019
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Application #:
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15260073
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Filing Dt:
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09/08/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Inventors:
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Timothy Stachowiak, Weijun Liu, Fen Wan, Gary Doyle, Niyaz Khusnatdinov
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Title:
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SUBSTRATE PRETREATMENT AND ETCH UNIFORMITY IN NANOIMPRINT LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME |
| OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| HEATHER L. FLANAGAN |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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