Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/03/2019
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Application #:
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15313250
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Filing Dt:
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11/22/2016
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Publication #:
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Pub Dt:
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06/29/2017
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PCT #:
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US2015032177
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Inventors:
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Jes Asmussen, Jing Lu, Yajun Gu, Shreya Nad
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Title:
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METHODS AND APPARATUS FOR MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 450 ADMINISTRATION BUILDING |
| EAST LANSING, MICHIGAN 48824-1046 |
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| MARSHALL, GERSTEIN & BORUN LLP |
| 233 S. WACKER DRIVE |
| 6300 WILLIS TOWER |
| CHICAGO, IL 60606-6357 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 450 ADMINISTRATION BUILDING |
| EAST LANSING, MICHIGAN 48824-1046 |
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| MARSHALL, GERSTEIN & BORUN LLP |
| 233 S. WACKER DRIVE |
| 6300 WILLIS TOWER |
| CHICAGO, IL 60606-6357 |
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