Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/07/2020
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Application #:
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15858342
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Filing Dt:
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12/29/2017
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Publication #:
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Pub Dt:
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07/04/2019
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Inventors:
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Chih-Yu Hsu, Peng Shen, Jiro Yokota, Nathan Stafford, Takashi Teramoto
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Title:
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SiN SELECTIVE ETCH TO SiO2 WITH NON-PLASMA DRY PROCESS FOR 3D NAND DEVICE APPLICATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 75 QUAI D'ORSAY |
| PARIS, FRANCE F-75007 |
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| AIR LIQUIDE USA LLC |
| 9811 KATY FREEWAY |
| SUITE 100 |
| HOUSTON, TX 77024 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9101 LBJ FREEWAY |
| DALLAS, TEXAS 75243 |
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| AIR LIQUIDE USA LLC |
| 9811 KATY FREEWAY |
| SUITE 100 |
| HOUSTON, TX 77024 |
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