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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10529589
Issue Dt:
01/07/2020
Application #:
15995173
Filing Dt:
06/01/2018
Publication #:
20180358233
Pub Dt:
12/13/2018
Inventors:
Erdinc Karakas, Li Wang, Andrew Nolan, Christopher Talone, Shyam Sridhar, Alok Ranjan et al
Title:
METHOD OF PLASMA ETCHING OF SILICON-CONTAINING ORGANIC FILM USING SULFUR-BASED CHEMISTRY
Assignment: 1
Reel/Frame:
047037/0357Recorded: 10/02/2018Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KARAKAS, ERDINC
Exec Dt:
08/31/2018
WANG, LI
Exec Dt:
09/10/2018
NOLAN, ANDREW
Exec Dt:
09/06/2018
TALONE, CHRISTOPHER
Exec Dt:
09/01/2018
SRIDHAR, SHYAM
Exec Dt:
08/31/2018
RANJAN, ALOK
Exec Dt:
08/31/2018
OHTAKE, HIROTO
Exec Dt:
09/02/2018
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
ROTHWELL, FIGG, ERNST & MANBECK, P.C.
607 14TH STREET, N.W.
SUITE 800
WASHINGTON, DC 20005

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