Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/14/2020
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Application #:
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16655164
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Filing Dt:
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10/16/2019
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Inventors:
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Zi-Wen CHEN, Po-Chung CHENG, Chih-Tsung SHIH, Li-Jui CHEN, Shih-Chang SHIH
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Title:
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METHODS AND APPARATUS FOR REMOVING CONTAMINATION FROM LITHOGRAPHIC TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITAL STREET, N.W. |
| WASHINGTON, DC 20001 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE EXECUTION DATE OF THE FIFTH INVENTOR PREVIOUSLY RECORDED AT REEL: 050739 FRAME: 0992. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| NO. 8, LI-HSIN RD. 6 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET, N.W. |
| WASHINGTON, DC 20001 |
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