Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/28/2020
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Application #:
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15786806
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Filing Dt:
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10/18/2017
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Publication #:
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Pub Dt:
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02/21/2019
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Inventors:
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Tristan Y. Ma, Huixiong Dai, Anthony Renau, John Hautala, Joseph Olson
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Title:
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PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KACVINSKY DAISAK BLUNI PLLC |
| 101 CARNEGIE CENTER SUITE 106 |
| PRINCETON, NJ 08540 |
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