Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/11/2020
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Application #:
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14917414
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Filing Dt:
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03/08/2016
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Publication #:
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Pub Dt:
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08/04/2016
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Inventors:
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Taro IKEDA, Shigeru KASAI, Emiko HARA, Yutaka FUJINO, Yuki OSADA, Jun NAKAGOMI et al
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Title:
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PLASMA PROCESSING DEVICE WITH SHOWER PLATE HAVING PROTRUSION FOR SUPPRESSING FILM FORMATION IN GAS HOLES OF SHOWER PLATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST STREET |
| 34492U_JLM_LC |
| ALEXANDRIA, VA 22314 |
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