Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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15849253
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Filing Dt:
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12/20/2017
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Publication #:
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Pub Dt:
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07/26/2018
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Inventors:
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Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
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Title:
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MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LOWENSTEIN SANDLER LLP |
| 390 LYTTON AVENUE |
| PALO ALTO, CA 94301 |
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