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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/17/2020
Application #:
15909812
Filing Dt:
03/01/2018
Publication #:
Pub Dt:
09/05/2019
Inventors:
Tae Seung Cho, Junghoon Kim, Kenneth D. Schatz, Dmitry Lubomirsky, Soonam Park et al
Title:
MAGNETIC INDUCTION PLASMA SOURCE FOR SEMICONDUCTOR PROCESSES AND EQUIPMENT
Assignment: 1
Reel/Frame:
050280/0909Recorded: 09/05/2019Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/24/2019
Exec Dt:
05/24/2019
Exec Dt:
05/24/2019
Exec Dt:
05/24/2019
Exec Dt:
05/24/2019
Exec Dt:
08/22/2019
Exec Dt:
05/24/2019
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
KILPATRICK TOWNSEND & STOCKTON LLP/AMAT
1100 PEACHTREE STREET
SUITE 2800
ATLANTA, GA 30309

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