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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10604841
Issue Dt:
03/31/2020
Application #:
15378854
Filing Dt:
12/14/2016
Publication #:
20180163305
Pub Dt:
06/14/2018
Inventors:
Rachel Batzer, Huatan Qiu, Will Schlosser, Bhadri Varadarajan, Patrick Girard Breiling et al
Title:
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION
Assignment: 1
Reel/Frame:
040961/0521Recorded: 12/15/2016Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BATZER, RACHEL
Exec Dt:
11/29/2016
QIU, HUATAN
Exec Dt:
11/22/2016
VARADARAJAN, BHADRI
Exec Dt:
11/22/2016
BREILING, PATRICK GIRARD
Exec Dt:
12/07/2016
GONG, BO
Exec Dt:
11/22/2016
SCHLOSSER, WILL
Exec Dt:
11/28/2016
GUI, ZHE
Exec Dt:
11/23/2016
TAN, TAIDE
Exec Dt:
12/09/2016
HOHN, GEOFFREY
Exec Dt:
12/02/2016
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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