Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/07/2020
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Application #:
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15976921
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Filing Dt:
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05/11/2018
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Publication #:
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Pub Dt:
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09/13/2018
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Inventors:
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Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura et al
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Title:
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SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
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| BUCHANAN INGERSOLL & ROONEY |
| 1737 KING STREET |
| ALEXANDRIA, VA 22314 |
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