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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10622186
Issue Dt:
04/14/2020
Application #:
16202514
Filing Dt:
11/28/2018
Publication #:
20190189389
Pub Dt:
06/20/2019
Inventors:
Takuya UEMURA, Takashi NAKAMURA, Hideki MATSUI, Munehiro OGASAWARA, Rieko NISHIMURA et al
Title:
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD
Assignment: 1
Reel/Frame:
047605/0981Recorded: 11/28/2018Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
UEMURA, TAKUYA
Exec Dt:
10/19/2018
NAKAMURA, TAKASHI
Exec Dt:
10/22/2018
MATSUI, HIDEKI
Exec Dt:
10/18/2018
OGASAWARA, MUNEHIRO
Exec Dt:
10/24/2018
NISHIMURA, RIEKO
Exec Dt:
10/22/2018
MUROFUSHI, TATSUYA
Exec Dt:
10/26/2018
HATTORI, YOSHIAKI
Exec Dt:
10/16/2018
Assignee:
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU
YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522
Correspondent:
OBLON, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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