Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/2020
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Application #:
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16245774
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Filing Dt:
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01/11/2019
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Publication #:
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Pub Dt:
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02/06/2020
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Inventors:
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WEI-CHUN YEN, CHI YANG, SHANG-CHIEH CHIEN, LI-JUI CHEN, PO-CHUNG CHENG
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Title:
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EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE AND A METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN |
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| WPAT, PC INTELLECTUAL PROPERTY ATTORNEYS |
| 1100 QUAIL STREET, SUITE 202 |
| NEWPORT BEACH, CA 92660 |
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