Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/2020
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Application #:
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15714703
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Filing Dt:
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09/25/2017
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Publication #:
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Pub Dt:
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03/29/2018
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Inventor:
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Yuichi SHIBAZAKI
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Title:
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LAYOUT METHOD, MARK DETECTION METHOD, EXPOSURE METHOD, MEASUREMENT DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 15-3, KONAN 2-CHOME, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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| MARIO A. COSTANTINO |
| OLIFF PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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