Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/23/2020
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Application #:
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15849306
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Filing Dt:
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12/20/2017
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Publication #:
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Pub Dt:
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06/28/2018
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Inventors:
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David Smith, Thorsten Lill, Andreas Fischer
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Title:
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ATOMIC LAYER ETCHING METHODS AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| DAVID F. LEE, MARTINE PENILLA GROUP, LLP |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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