Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/14/2020
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Application #:
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16315026
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Filing Dt:
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01/03/2019
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Publication #:
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Pub Dt:
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10/10/2019
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Inventors:
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Marinus JOCHEMSEN, Stefan HUNSCHE, Wim Tjibbo TEL
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Title:
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METHOD OF PREDICTING PATTERNING DEFECTS CAUSED BY OVERLAY ERROR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP(ASML |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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