Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/2020
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Application #:
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16427288
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Filing Dt:
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05/30/2019
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Publication #:
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Pub Dt:
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01/09/2020
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Inventors:
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Timothee Julien Vincent Blanquart, Mitsuya Utsuno, Yoshio Susa, Atsuki Fukazawa et al
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Title:
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METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FILL LAYER BY PULSE PLASMA-ASSISTED DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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VERSTERKERSTRAAT 8 |
ALMERE, NETHERLANDS 1322 AP |
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PATRICK LEE |
3440 E. UNIVERSITY DRIVE |
PHOENIX, AZ 85034 |
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