Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/22/2020
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Application #:
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16010800
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Filing Dt:
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06/18/2018
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Publication #:
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Pub Dt:
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12/19/2019
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Inventor:
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Masahiro TABATA
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Title:
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METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, NW |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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