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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
10788748
Issue Dt:
09/29/2020
Application #:
16197658
Filing Dt:
11/21/2018
Publication #:
20190107776
Pub Dt:
04/11/2019
Inventors:
Holger Seitz, Thomas Trautzsch, Christoph Husemann, Thomas Thaler, Ute Buttgereit et al
Title:
METHOD AND APPLIANCE FOR PREDICTING THE IMAGING RESULT OBTAINED WITH A MASK WHEN A LITHOGRAPHY PROCESS IS CARRIED OUT
Assignment: 1
Reel/Frame:
051213/0008Recorded: 12/09/2019Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
THALER, THOMAS
Exec Dt:
01/07/2019
SEITZ, HOLGER
Exec Dt:
01/07/2019
BUTTGEREIT, UTE
Exec Dt:
01/07/2019
TRAUTZSCH, THOMAS
Exec Dt:
12/06/2019
TOP-DIALLO, MAME KOUNA
Exec Dt:
10/05/2019
HUSEMANN, CHRISTOPH
Exec Dt:
12/19/2018
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
053583/0274Recorded: 08/25/2020Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
TOP-DIALLO, MAME KOUNA
Exec Dt:
08/17/2020
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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