Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2020
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Application #:
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14893532
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Filing Dt:
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05/16/2018
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Publication #:
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Pub Dt:
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08/23/2018
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Inventors:
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Kuanju FU, Caiqin CHEN, Zhonglai WANG
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Title:
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METHOD OF DETECTING SIZE OF PATTERN FORMED BY PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.9-2, TANGMING ROAD, GUANGMING NEW DISTRICT |
| SHENZHEN, GUANGDONG, CHINA 518132 |
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| BUILDING C5,BIOLAKE OF OPTICS VALLEY,NO.666 GAOXIN |
| AVENUE, WUHAN EAST LAKE HIGH-TECH DEVELOPMENT ZONE |
| WUHAN, HUBEI, CHINA 430079 |
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| SOROKER-AGMON ADVOCATE AND PATENT ATTORN |
| 8 HAHOSHLIM STREET |
| P.O. BOX 12425 |
| HERZLIYA, 4672408 ISRAEL |
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