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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10795265
Issue Dt:
10/06/2020
Application #:
16521052
Filing Dt:
07/24/2019
Publication #:
20200041913
Pub Dt:
02/06/2020
Inventors:
Norihisa KOGA, Yoshitaka KONISHI, Naruaki IIDA, Yuzo OHISHI, Kazuhiro TAKESHITA
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM
Assignment: 1
Reel/Frame:
049900/0101Recorded: 07/30/2019Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KOGA, NORIHISA
Exec Dt:
07/04/2019
KONISHI, YOSHITAKA
Exec Dt:
07/10/2019
IIDA, NARUAKI
Exec Dt:
07/04/2019
OHISHI, YUZO
Exec Dt:
07/01/2019
TAKESHITA, KAZUHIRO
Exec Dt:
07/08/2019
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH GOLDBERG & MEYER
112 S. WEST ST.
36719U_JLM/ALS
ALEXANDRIA, VA 22314

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