Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/13/2020
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Application #:
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14136953
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Filing Dt:
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12/20/2013
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Publication #:
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Pub Dt:
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06/25/2015
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Inventors:
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Ambarish Chhatre, David Schaefer, Keith Gaff
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Title:
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EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL & ROONEY PC - LAM RES |
| 1737 KING STREET, SUITE 500 |
| ALEXANDRIA, VA 22314 |
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