Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/2020
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Application #:
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15997251
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Filing Dt:
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06/04/2018
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Publication #:
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Pub Dt:
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10/03/2019
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Inventors:
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Tzu-Yu Liu, Kyu-HA Shim, Tom Ho Wing Yu, Zhong Qiang Hua, Adolph Miller Allen et al
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Title:
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TECHNIQUES FOR FORMING LOW STRESS ETCH-RESISTANT MASK USING IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KACVINSKY DAISAK BLUNI PLLC |
| 101 CARNEGIE CENTER SUITE 106 |
| PRINCETON, NJ 08540 |
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