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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/10/2020
Application #:
15375295
Filing Dt:
12/12/2016
Publication #:
Pub Dt:
06/29/2017
Inventors:
Yoshinori Ikeda, Kazuyoshi Shinohara, Yuki Taniguchi
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
040706/0100Recorded: 12/12/2016Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/02/2016
Exec Dt:
12/02/2016
Exec Dt:
12/02/2016
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-6325, JAPAN
Correspondent:
ABELMAN, FRAYNE & SCHWAB/LEE
666 THIRD AVENUE
10TH FLOOR
NEW YORK, NY 10017-5621

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