Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/08/2020
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Application #:
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16561329
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Filing Dt:
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09/05/2019
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Publication #:
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Pub Dt:
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12/26/2019
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Inventors:
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Danny D. WANG, Jun Tae CHOI, Zhong Qiang HUA, Jason Michael LAMB, Rupankar CHOUDHURY et al
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Title:
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ALIGNMENT SYSTEMS EMPLOYING ACTUATORS PROVIDING RELATIVE DISPLACEMENT BETWEEN LID ASSEMBLIES OF PROCESS CHAMBERS AND SUBSTRATES, AND RELATED METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN LLP |
| 24 GREENWAY PLAZA |
| SUITE 1600 |
| HOUSTON, TX 77046 |
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