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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/12/2021
Application #:
16328269
Filing Dt:
02/25/2019
Publication #:
Pub Dt:
07/11/2019
Inventors:
Tatsuya MATSUMOTO, Keisuke WASHIO
Title:
ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHOD
Assignment: 1
Reel/Frame:
048431/0673Recorded: 02/25/2019Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/19/2019
Exec Dt:
02/19/2019
Assignee:
11-1, OSAKI 1-CHOME
SHINAGAWA-KU, TOKYO, JAPAN 141-0032
Correspondent:
MITCHELL W. SHAPIRO
8607 WESTWOOD CENTER DRIVE, SUITE 320
TYSONS CORNER, VA 22182

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