Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/26/2021
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Application #:
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16537048
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Filing Dt:
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08/09/2019
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Publication #:
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Pub Dt:
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11/28/2019
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Inventors:
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Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Toan Tran, Dmitry Lubomirsky
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Title:
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SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KILPATRICK TOWNSEND & STOCKTON LLP/AMAT |
| 1100 PEACHTREE STREET |
| SUITE 2800 |
| ATLANTA, GA 30309 |
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