Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/09/2021
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Application #:
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16377338
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Filing Dt:
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04/08/2019
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Publication #:
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Pub Dt:
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08/01/2019
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Inventors:
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Derek Bassett, Wallace P. Printz, Antonio L. P. Rotondaro, Teruomi Minami et al
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Title:
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PROCESS AND APPARATUS FOR PROCESSING A NITRIDE STRUCTURE WITHOUT SILICA DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| WOOD HERRON & EVANS LLP |
| 441 VINE STREET |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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