Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/2021
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Application #:
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15723837
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Filing Dt:
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10/03/2017
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Publication #:
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Pub Dt:
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04/26/2018
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Inventors:
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Dong-Hyub LEE, Dougyong SUNG, Juho Lee, Yun-Kwang JEON, Je-Hun WOO, Bongseong KIM et al
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Title:
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Antennas, Circuits for Generating Plasma, Plasma Processing Apparatus, and Methods of Manufacturing Semiconductor Devices Using the Same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| GYEONGGI-DO |
| SUWON-SI, KOREA, REPUBLIC OF 16677 |
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| MYERS BIGEL, P.A. |
| 4140 PARKLAKE AVENUE |
| SUITE 600 |
| RALEIGH, NC 27612 |
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