Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2021
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Application #:
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17020379
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Filing Dt:
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09/14/2020
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Inventors:
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Kuang-Jui CHANG, Chun-Hsien TSAI, Ting-Chuan LEE, Chun-Jung TSAI, Yu-Hsuan LIAO
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Title:
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DRY ETCHING PROCESS FOR MANUFACTURING TRENCH STRUCTURE OF SEMICONDUCTOR APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5F., NO.50-1, KEYAN RD., HSINCHU SCIENCE PARK, |
| ZHUNAN TOWNSHIP, MIAOLI COUNTY, TAIWAN 35053 |
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| MUNCY, GEISSLER, OLDS & LOWE, PC |
| 4000 LEGATO RD., SUITE 310 |
| FAIRFAX, VA 22033 |
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