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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/11/2021
Application #:
16050089
Filing Dt:
07/31/2018
Publication #:
Pub Dt:
11/22/2018
Inventors:
Michikazu MORIMOTO, Naoki YASUI, Yasuo OHGOSHI
Title:
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
052225/0894Recorded: 03/25/2020Pages: 15
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/14/2020
Assignee:
17-1, TORANOMON 1-CHOME
MINATO -KU, TOKYO, JAPAN
Correspondent:
MILES & STOCKBRIDGE, P.C.
1751 PINNACLE DR.
SUITE 1500
TYSON'S CORNER, VA 22102

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