Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/11/2021
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Application #:
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15758436
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Filing Dt:
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03/08/2018
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Publication #:
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Pub Dt:
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08/30/2018
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Inventors:
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Sean R. Kirkpatrick, Richard C. Svrluga
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Title:
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METHOD FOR ULTRA-SHALLOW ETCHING USING NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 20 FORTUNE DRIVE |
| BILLERICA, MASSACHUSETTS 01821 |
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| BURNS & LEVINSON LLP |
| 125 SUMMER STREET |
| BOSTON, MA 02110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 20 FORTUNE DRIVE |
| BILLERICA, MASSACHUSETTS 01821 |
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| BURNS & LEVINSON LLP |
| 125 SUMMER STREET |
| BOSTON, MA 02110 |
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