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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/25/2021
Application #:
16001264
Filing Dt:
06/06/2018
Publication #:
Pub Dt:
12/06/2018
Inventors:
Yi YANG, Nattaworn Boss NUNTA, Tuan Anh NGUYEN, Sanjeev BALUJA, Truong NGUYEN et al
Title:
DEPOSITION RADIAL AND EDGE PROFILE TUNABILITY THROUGH INDEPENDENT CONTROL OF TEOS FLOW
Assignment: 1
Reel/Frame:
047551/0769Recorded: 11/20/2018Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/28/2018
Exec Dt:
08/27/2018
Exec Dt:
08/27/2018
Exec Dt:
08/27/2018
Exec Dt:
10/22/2018
Exec Dt:
08/27/2018
Exec Dt:
08/27/2018
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PATTERSON + SHERIDAN, LLP
24 GREENWAY PLAZA, SUITE 1600
HOUSTON, TX 77046

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