Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2021
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Application #:
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16490529
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Filing Dt:
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08/31/2019
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Publication #:
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Pub Dt:
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01/09/2020
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Inventors:
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Keisuke WASHIO, Tatsuya MATSUMOTO, Masao NAKATA, Junichi SHIDA
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Title:
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FILM-FORMING METHOD, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND PLASMA ATOMIC LAYER DEPOSITION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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11-1, OSAKI 1-CHOME |
SHINAGAWA-KU, TOKYO, JAPAN 141-0032 |
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MITCHELL W. SHAPIRO |
8607 WESTWOOD CENTER DRIVE, SUITE 320 |
TYSONS CORNER, VA 22182 |
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