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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/29/2021
Application #:
16642927
Filing Dt:
02/28/2020
Publication #:
Pub Dt:
11/05/2020
Inventors:
Victor Antonio PEREZ-FALCON, Michael Andrew CHIEDA
Title:
Apparatus for and Method Cleaning a Support Inside a Lithography Apparatus
Assignment: 1
Reel/Frame:
053330/0087Recorded: 07/28/2020Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/07/2017
Exec Dt:
09/07/2017
Assignee:
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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