Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/13/2021
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Application #:
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16934281
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Filing Dt:
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07/21/2020
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Publication #:
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Pub Dt:
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11/26/2020
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Inventors:
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Akira Fujimura, Nagesh Shirali, Ryan Pearman, Harold Robert Zable, William E. Guthrie
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Title:
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METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE FOR A LOCAL PATTERN DENSITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4040 MOORPARK AVENUE #250 |
| SAN JOSE, CALIFORNIA 95117 |
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| GRACE SCHULZ |
| MLO |
| 12707 HIGH BLUFF DRIVE, SUITE 200 |
| SAN DIEGO, CA 92130 |
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