Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/13/2021
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Application #:
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16804572
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Filing Dt:
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02/28/2020
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Publication #:
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Pub Dt:
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06/25/2020
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Inventor:
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Shawming Ma
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Title:
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Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 47131 BAYSIDE PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| DORITY & MANNING, P.A. AND MATTSON |
| PO BOX 1449 |
| GREENVILLE, SC 29602 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 47131 BAYSIDE PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| NO. 8 BUILDING, NO. 28 JINGHAI ER RD |
| ECONOMIC AND TECHNICAL DEVELOPMENT ZONE |
| BEJING, CHINA 100176 |
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| DORITY & MANNING, P.A. AND MATTSON |
| PO BOX 1449 |
| GREENVILLE, SC 29602 |
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