Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/20/2021
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Application #:
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16560713
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Filing Dt:
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09/04/2019
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Publication #:
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Pub Dt:
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03/12/2020
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Inventors:
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Xiaobo Shi, Hongjun Zhou, James Allen Schlueter, Jo-Ann T. Schwartz
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Title:
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Chemical Mechanical Planarization For Tungsten-Containing Substrates
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| PATENT DEPT. |
| TEMPE, ARIZONA 85284 |
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| LISA HOFFMANN |
| 7350 TILGHMAN STREET, SUITE 104 |
| PATENT DEPT. |
| ALLENTOWN, PA 18106-9000 |
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