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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	11067515	Issue Dt:	07/20/2021	Application #:	15904075	Filing Dt:	02/23/2018
Publication #:	20190162675	Pub Dt:	05/30/2019
Inventors:	Stanley SHIN, Kai-Hsiang Chang, Keith Kuang-Kuo Koai, Sheng Cho Lin
Title:	APPARATUS AND METHOD FOR INSPECTING A WAFER PROCESS CHAMBER

Assignment: 1

Reel/Frame:

046103/0970

Recorded: 06/15/2018

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

SHIN, STANLEY

Exec Dt:

02/13/2018

CHANG, KAI-HSIANG

Exec Dt:

02/13/2018

LIN, SHENG-CHO

Exec Dt:

02/13/2018

KOAI, KEITH KUANG-KUO

Exec Dt:

02/21/2018

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK

HSIN-CHU, TAIWAN 300-77

Correspondent:

DUANE MORRIS LLP (TSMC) IP DEPARTMENT

30 SOUTH 17TH STREET

PHILADELPHIA, PA 19103-4196

Assignment: 2

Reel/Frame:

057003/0532

Recorded: 07/15/2021

Pages: 5

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE THIRD ASSIGNOR'S NAME INSIDE THE ASSIGNMENT DOCUMENT PREVIOUSLY RECORDED AT REEL: 046103 FRAME: 0970. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.

Assignors:

SHIN, STANLEY

Exec Dt:

02/13/2018